This Z-axis vertical positioning is made of aluminum alloy.
The stage size is 90X90 mm.
The travel stroke is 20 mm.
The Load Capacity is 5 kg.
is 0.1 microns / 0.05 microns with 10 / 20 micro-step per step
The typical repeatability accuracy is ±0.5 microns.
The typical positioning accuracy is 10 microns.
The maximum speed is 5 mm / sec.