This XYZ three-axis positioning is made of aluminum alloy.
The stage size is 120X120 mm.
The travel stroke is 70 mm.
capacity is 13.5 Kgf.
is 0.2 Ám / 0.1 Ám with 10 / 20 micro-step per step
The typical repeatability accuracy is ±0.5 µm.
The typical positioning accuracy is 10 µm.
The maximum speed is 10 mm / sec.