XY-axis positioning is made of aluminum alloy.
The stage size is 100 x 100 mm.
The travel stroke is 40 mm.
The load capacity is 21 Kgf.
The resolution is 0.5 Ám / 0.25 Ám with 10 / 20 micro-steps per step motor driver.
The typical repeatability accuracy is ± 2 µm.
The typical positioning accuracy is 25 µm.
The maximum speed is 5 mm / sec.