XY-axis positioning is made of aluminum alloy.
The stage size is 120 x 120 mm.
The travel stroke is 70 mm.
The load capacity is 22 Kgf.
The resolution is 0.5 Ám / 0.25 Ám with 10 / 20 micro-steps per step motor driver.
The typical repeatability accuracy is ± 1 µm.
The typical positioning accuracy is 15 µm.
The maximum speed is 10 mm / sec.