This motorized Z-axis positioning is made of aluminum
The stage size is 80X80 mm.
The travel stroke is 30 mm.
capacity is 10 Kgf.
is 0.2 µm / 0.1 µm with 10 / 20 micro-steps per step
The typical repeatability accuracy is ±0.5 µm.
The typical positioning accuracy is 5 µm.
The maximum speed is 10 mm / sec.