This Z-axis vertical positioning is made of aluminum alloy.
The stage size is 90X90 mm.
The travel stroke is 20 mm.
capacity is 5 Kgf.
is 0.1 Ám / 0.05 Ám with 10 / 20 micro-step per step
The typical repeatability accuracy is ±0.5 µm.
The typical positioning accuracy is 10 µm.
The maximum speed is 5 mm / sec.