X-axis positioning is made of aluminum alloy.
The stage size is 50 x 50 mm.
The travel stroke is 75 mm.
The load capacity is 10 Kgf.
The resolution is 0.5 Ám / 0.25 Ám with 10 / 20 micro-steps per step motor driver.
The typical repeatability accuracy is ± 0.5 µm.
The typical positioning accuracy is 7 µm.
The maximum speed is 20 mm / sec.