X-axis positioning is made of aluminum alloy.
The stage size is 60 x 60 mm.
The travel stroke is 200 mm.
The load capacity is 14 Kgf.
resolution is 1 Ám / 0.5 Ám with 10 / 20
micro-steps per step motor driver.
The typical repeatability accuracy is ± 1 µm.
The typical positioning accuracy is 20 µm.
The maximum speed is 40 mm / sec.