XY-axis positioning is made of stainless steel with cover.
The stage size is 80 x 80 mm.
The travel stroke is 50 mm.
The load capacity is 14 Kgf.
The resolution is 10 µm / 5 µm .
The typical repeatability accuracy is ± 1 µm.
The typical positioning accuracy is 15 µm.
The maximum speed is 40 mm / sec.